A study of hydrogen peroxide decomposition in ammonia-peroxide mixtures (APM)

S. Siddiqui; M. Keswani; B. Brooks; A. Fuerst; S. Raghavan

doi:10.1016/j.mee.2012.04.003

A study of hydrogen peroxide decomposition in ammonia-peroxide mixtures (APM)

S. Siddiqui, M. Keswani, B. Brooks, A. Fuerst, S. Raghavan

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

The stability of ammonia-peroxide mixtures (APM) has been investigated as a function of temperature (24-65°C), dilution ratio (1:1:5-1:2:100) and Fe ²⁺ concentration (0-10 ppb) using an optical concentration monitor. The results show that the change in hydrogen peroxide concentration increased with an increase in temperature and Fe ²⁺ concentration in a four hour period. The decomposition rate of hydrogen peroxide increased with an increase in solution pH in the range of 8.0 to 9.7. The kinetic analysis of experimental data showed that the H ₂O ₂ decomposition reaction follows a first order kinetics with respect to both H ₂O ₂ and OH ^- concentrations. In the presence of Fe ²⁺, hydrogen peroxide decomposition followed a first order reaction kinetics with respect to H ₂O ₂ concentration. The calculated rate constant increased with an increase in temperature and Fe ²⁺ concentration. The apparent activation energy of H ₂O ₂ decomposition was calculated to be 65 ± 3 kJ/mol. In the presence of Fe ²⁺, the activation energy was calculated to be 50 ± 5 kJ/mol.

Original language	English (US)
Pages (from-to)	68-73
Number of pages	6
Journal	Microelectronic Engineering
Volume	102
DOIs	https://doi.org/10.1016/j.mee.2012.04.003
State	Published - Feb 2013
Externally published	Yes

Keywords

Ammonia-peroxide mixtures
Ammonium hydroxide loss
Hydrogen peroxide decomposition
Iron (Fe )
Wafer cleaning

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.mee.2012.04.003

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@article{475ae850c713455597a725be5654b817,

title = "A study of hydrogen peroxide decomposition in ammonia-peroxide mixtures (APM)",

abstract = "The stability of ammonia-peroxide mixtures (APM) has been investigated as a function of temperature (24-65°C), dilution ratio (1:1:5-1:2:100) and Fe 2+ concentration (0-10 ppb) using an optical concentration monitor. The results show that the change in hydrogen peroxide concentration increased with an increase in temperature and Fe 2+ concentration in a four hour period. The decomposition rate of hydrogen peroxide increased with an increase in solution pH in the range of 8.0 to 9.7. The kinetic analysis of experimental data showed that the H 2O 2 decomposition reaction follows a first order kinetics with respect to both H 2O 2 and OH - concentrations. In the presence of Fe 2+, hydrogen peroxide decomposition followed a first order reaction kinetics with respect to H 2O 2 concentration. The calculated rate constant increased with an increase in temperature and Fe 2+ concentration. The apparent activation energy of H 2O 2 decomposition was calculated to be 65 ± 3 kJ/mol. In the presence of Fe 2+, the activation energy was calculated to be 50 ± 5 kJ/mol.",

keywords = "Ammonia-peroxide mixtures, Ammonium hydroxide loss, Hydrogen peroxide decomposition, Iron (Fe ), Wafer cleaning",

author = "S. Siddiqui and M. Keswani and B. Brooks and A. Fuerst and S. Raghavan",

note = "Funding Information: The authors gratefully acknowledge Intel Corp. for providing financial support, (Grant # 2001-MC-425) through SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing. The authors would also like to acknowledge Mr. Eric Hebert from Horiba Inc. for providing assistance with the set-up of the Horiba monitor and Mr. Ryan Biggie of the University of Arizona for his help with conducting experiments.",

year = "2013",

month = feb,

doi = "10.1016/j.mee.2012.04.003",

language = "English (US)",

volume = "102",

pages = "68--73",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - A study of hydrogen peroxide decomposition in ammonia-peroxide mixtures (APM)

AU - Siddiqui, S.

AU - Keswani, M.

AU - Brooks, B.

AU - Fuerst, A.

AU - Raghavan, S.

N1 - Funding Information: The authors gratefully acknowledge Intel Corp. for providing financial support, (Grant # 2001-MC-425) through SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing. The authors would also like to acknowledge Mr. Eric Hebert from Horiba Inc. for providing assistance with the set-up of the Horiba monitor and Mr. Ryan Biggie of the University of Arizona for his help with conducting experiments.

PY - 2013/2

Y1 - 2013/2

N2 - The stability of ammonia-peroxide mixtures (APM) has been investigated as a function of temperature (24-65°C), dilution ratio (1:1:5-1:2:100) and Fe 2+ concentration (0-10 ppb) using an optical concentration monitor. The results show that the change in hydrogen peroxide concentration increased with an increase in temperature and Fe 2+ concentration in a four hour period. The decomposition rate of hydrogen peroxide increased with an increase in solution pH in the range of 8.0 to 9.7. The kinetic analysis of experimental data showed that the H 2O 2 decomposition reaction follows a first order kinetics with respect to both H 2O 2 and OH - concentrations. In the presence of Fe 2+, hydrogen peroxide decomposition followed a first order reaction kinetics with respect to H 2O 2 concentration. The calculated rate constant increased with an increase in temperature and Fe 2+ concentration. The apparent activation energy of H 2O 2 decomposition was calculated to be 65 ± 3 kJ/mol. In the presence of Fe 2+, the activation energy was calculated to be 50 ± 5 kJ/mol.

AB - The stability of ammonia-peroxide mixtures (APM) has been investigated as a function of temperature (24-65°C), dilution ratio (1:1:5-1:2:100) and Fe 2+ concentration (0-10 ppb) using an optical concentration monitor. The results show that the change in hydrogen peroxide concentration increased with an increase in temperature and Fe 2+ concentration in a four hour period. The decomposition rate of hydrogen peroxide increased with an increase in solution pH in the range of 8.0 to 9.7. The kinetic analysis of experimental data showed that the H 2O 2 decomposition reaction follows a first order kinetics with respect to both H 2O 2 and OH - concentrations. In the presence of Fe 2+, hydrogen peroxide decomposition followed a first order reaction kinetics with respect to H 2O 2 concentration. The calculated rate constant increased with an increase in temperature and Fe 2+ concentration. The apparent activation energy of H 2O 2 decomposition was calculated to be 65 ± 3 kJ/mol. In the presence of Fe 2+, the activation energy was calculated to be 50 ± 5 kJ/mol.

KW - Ammonia-peroxide mixtures

KW - Ammonium hydroxide loss

KW - Hydrogen peroxide decomposition

KW - Iron (Fe )

KW - Wafer cleaning

UR - http://www.scopus.com/inward/record.url?scp=84869088600&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84869088600&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2012.04.003

DO - 10.1016/j.mee.2012.04.003

M3 - Article

AN - SCOPUS:84869088600

SN - 0167-9317

VL - 102

SP - 68

EP - 73

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

A study of hydrogen peroxide decomposition in ammonia-peroxide mixtures (APM)

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