TY - JOUR
T1 - A study of hydrogen peroxide decomposition in ammonia-peroxide mixtures (APM)
AU - Siddiqui, S.
AU - Keswani, M.
AU - Brooks, B.
AU - Fuerst, A.
AU - Raghavan, S.
N1 - Funding Information:
The authors gratefully acknowledge Intel Corp. for providing financial support, (Grant # 2001-MC-425) through SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing. The authors would also like to acknowledge Mr. Eric Hebert from Horiba Inc. for providing assistance with the set-up of the Horiba monitor and Mr. Ryan Biggie of the University of Arizona for his help with conducting experiments.
PY - 2013/2
Y1 - 2013/2
N2 - The stability of ammonia-peroxide mixtures (APM) has been investigated as a function of temperature (24-65°C), dilution ratio (1:1:5-1:2:100) and Fe 2+ concentration (0-10 ppb) using an optical concentration monitor. The results show that the change in hydrogen peroxide concentration increased with an increase in temperature and Fe 2+ concentration in a four hour period. The decomposition rate of hydrogen peroxide increased with an increase in solution pH in the range of 8.0 to 9.7. The kinetic analysis of experimental data showed that the H 2O 2 decomposition reaction follows a first order kinetics with respect to both H 2O 2 and OH - concentrations. In the presence of Fe 2+, hydrogen peroxide decomposition followed a first order reaction kinetics with respect to H 2O 2 concentration. The calculated rate constant increased with an increase in temperature and Fe 2+ concentration. The apparent activation energy of H 2O 2 decomposition was calculated to be 65 ± 3 kJ/mol. In the presence of Fe 2+, the activation energy was calculated to be 50 ± 5 kJ/mol.
AB - The stability of ammonia-peroxide mixtures (APM) has been investigated as a function of temperature (24-65°C), dilution ratio (1:1:5-1:2:100) and Fe 2+ concentration (0-10 ppb) using an optical concentration monitor. The results show that the change in hydrogen peroxide concentration increased with an increase in temperature and Fe 2+ concentration in a four hour period. The decomposition rate of hydrogen peroxide increased with an increase in solution pH in the range of 8.0 to 9.7. The kinetic analysis of experimental data showed that the H 2O 2 decomposition reaction follows a first order kinetics with respect to both H 2O 2 and OH - concentrations. In the presence of Fe 2+, hydrogen peroxide decomposition followed a first order reaction kinetics with respect to H 2O 2 concentration. The calculated rate constant increased with an increase in temperature and Fe 2+ concentration. The apparent activation energy of H 2O 2 decomposition was calculated to be 65 ± 3 kJ/mol. In the presence of Fe 2+, the activation energy was calculated to be 50 ± 5 kJ/mol.
KW - Ammonia-peroxide mixtures
KW - Ammonium hydroxide loss
KW - Hydrogen peroxide decomposition
KW - Iron (Fe )
KW - Wafer cleaning
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U2 - 10.1016/j.mee.2012.04.003
DO - 10.1016/j.mee.2012.04.003
M3 - Article
AN - SCOPUS:84869088600
VL - 102
SP - 68
EP - 73
JO - Microelectronic Engineering
JF - Microelectronic Engineering
SN - 0167-9317
ER -