A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature

Jian Gu; Ravi Gupta; Chia Fu Chou; Qihuo Wei; Frederic Zenhausern

A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature

Jian Gu, Ravi Gupta, Chia Fu Chou, Qihuo Wei, Frederic Zenhausern

Basic Medical Sciences, Phoenix

Research output: Contribution to conference › Paper › peer-review

Abstract

A composite cap sealing process with precise dimension control, low pressure operation and permanent bonding at room temperatures has been demonstrated for the fabrication of 1D, 2D nanochannels (confinement in one and two dimensions, respectively), and integrated nano/microfluidic devices with a micro- to nanoscale interface. Channel size below 20 nm has been successfully sealed. Aspect ratio of < 4×10^-5 has been achieved for 1D nanochannels.

Original language	English (US)
Pages	1193-1195
Number of pages	3
State	Published - 2006
Event	10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006 - Tokyo, Japan Duration: Nov 5 2006 → Nov 9 2006

Other

Other	10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006
Country/Territory	Japan
City	Tokyo
Period	11/5/06 → 11/9/06

Keywords

Microchannels
Nano-microfluidic interface
Nanochannels
Sealing

ASJC Scopus subject areas

Chemical Engineering (miscellaneous)
Bioengineering

Cite this

A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature. / Gu, Jian; Gupta, Ravi; Chou, Chia Fu et al.
2006. 1193-1195 Paper presented at 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006, Tokyo, Japan.

Research output: Contribution to conference › Paper › peer-review

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abstract = "A composite cap sealing process with precise dimension control, low pressure operation and permanent bonding at room temperatures has been demonstrated for the fabrication of 1D, 2D nanochannels (confinement in one and two dimensions, respectively), and integrated nano/microfluidic devices with a micro- to nanoscale interface. Channel size below 20 nm has been successfully sealed. Aspect ratio of < 4×10-5 has been achieved for 1D nanochannels.",

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author = "Jian Gu and Ravi Gupta and Chou, {Chia Fu} and Qihuo Wei and Frederic Zenhausern",

year = "2006",

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T1 - A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature

AU - Gu, Jian

AU - Gupta, Ravi

AU - Chou, Chia Fu

AU - Wei, Qihuo

AU - Zenhausern, Frederic

PY - 2006

Y1 - 2006

N2 - A composite cap sealing process with precise dimension control, low pressure operation and permanent bonding at room temperatures has been demonstrated for the fabrication of 1D, 2D nanochannels (confinement in one and two dimensions, respectively), and integrated nano/microfluidic devices with a micro- to nanoscale interface. Channel size below 20 nm has been successfully sealed. Aspect ratio of < 4×10-5 has been achieved for 1D nanochannels.

AB - A composite cap sealing process with precise dimension control, low pressure operation and permanent bonding at room temperatures has been demonstrated for the fabrication of 1D, 2D nanochannels (confinement in one and two dimensions, respectively), and integrated nano/microfluidic devices with a micro- to nanoscale interface. Channel size below 20 nm has been successfully sealed. Aspect ratio of < 4×10-5 has been achieved for 1D nanochannels.

KW - Microchannels

KW - Nano-microfluidic interface

KW - Nanochannels

KW - Sealing

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T2 - 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006

Y2 - 5 November 2006 through 9 November 2006

ER -

A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature

Abstract

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Keywords

ASJC Scopus subject areas

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