A planar ion trapping microdevice with integrated waveguides for optical detection

A planar ion trap with an integrated waveguide was fabricated and characterized. The microdevice, consisting of a 1 mm-diameter onehole ring trap and multi-mode optical waveguides, was made on a glass wafer using microfabrication techniques. The experimental results demonstrate that the microdevice can trap 1.5 μm-to 150 μm-diameter charged particles in air under an alternating electric field with the amplitude and frequency varying from 100 V to 750 V, and 100 Hz to 700 Hz, respectively. The on-chip waveguide is capable of detecting the presence of a particle in the trap, and the particle secular motion frequency was found to depend on the input alternating signal amplitude and frequency.