@inproceedings{5224980b080a4ab2bd56602abba04bc5,
title = "A novel heterodyne displacement interferometer with no detectable periodic nonlinearity and optical resolution doubling",
abstract = "This paper describes a novel heterodyne laser interferometer with no significant periodic nonlinearity for linear displacement measurements. It uses two spatially separated beams with an offset frequency and an interferometer configuration which has no mixed states to prevent polarization mixing. Moreover, the optical configurations have the benefit of doubling the measurement resolution when compared to its respective traditional counterparts. Experimental results show no discernable periodic nonlinearity for a retro-reflector interferometer and plane mirror interferometer configurations with a noise level below 20 pm.",
author = "Joo, {Ki Nam} and Ellis, {Jonathan D.} and Buice, {Eric S.} and Spronck, {Jo W.} and {Munnig Schmidt}, {Robert H.}",
year = "2010",
language = "English (US)",
series = "Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010",
publisher = "euspen",
pages = "67--70",
editor = "{Van Brussel}, H. and Henny Spaan and P. Shore and Theresa Burke",
booktitle = "Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010",
note = "10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 ; Conference date: 31-05-2010 Through 04-06-2010",
}