Abstract
A novel approach to the synthesis of axially symmetric electrostatic lenses with minimum aberrations is presented. The method uses computer optimization to determine the electrode potentials of a multielectrode lens. The same method can be used for designing lenses for many different applications. As a preliminary result, an example of a lens with very small spherical aberration is given. The synthesis of electrostatic lenses can be accomplished automatically with an experimental setup controlled by an on-line computer.
Original language | English (US) |
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Pages (from-to) | 1181-1183 |
Number of pages | 3 |
Journal | IEEE Transactions on Electron Devices |
Volume | 35 |
Issue number | 7 |
DOIs | |
State | Published - Jul 1988 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering