A Novel Approach to the Synthesis of Electrostatic Lenses with Minimized Aberrations

Jeno SzÉp; Miklos Szilagyi

doi:10.1109/16.3388

A Novel Approach to the Synthesis of Electrostatic Lenses with Minimized Aberrations

Jeno SzÉp, Miklos Szilagyi

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A novel approach to the synthesis of axially symmetric electrostatic lenses with minimum aberrations is presented. The method uses computer optimization to determine the electrode potentials of a multielectrode lens. The same method can be used for designing lenses for many different applications. As a preliminary result, an example of a lens with very small spherical aberration is given. The synthesis of electrostatic lenses can be accomplished automatically with an experimental setup controlled by an on-line computer.

Original language	English (US)
Pages (from-to)	1181-1183
Number of pages	3
Journal	IEEE Transactions on Electron Devices
Volume	35
Issue number	7
DOIs	https://doi.org/10.1109/16.3388
State	Published - Jul 1988

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/16.3388

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title = "A Novel Approach to the Synthesis of Electrostatic Lenses with Minimized Aberrations",

abstract = "A novel approach to the synthesis of axially symmetric electrostatic lenses with minimum aberrations is presented. The method uses computer optimization to determine the electrode potentials of a multielectrode lens. The same method can be used for designing lenses for many different applications. As a preliminary result, an example of a lens with very small spherical aberration is given. The synthesis of electrostatic lenses can be accomplished automatically with an experimental setup controlled by an on-line computer.",

author = "Jeno Sz{\'E}p and Miklos Szilagyi",

note = "Funding Information: Manuscript received November 16, 1987; revised January 25, 1988. This work was supported by the National Science Foundation under Grant ECS 8700849. The authors are with the Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 8572 I. IEEE Log Number 8820262.",

year = "1988",

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AU - Szilagyi, Miklos

N1 - Funding Information: Manuscript received November 16, 1987; revised January 25, 1988. This work was supported by the National Science Foundation under Grant ECS 8700849. The authors are with the Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 8572 I. IEEE Log Number 8820262.

PY - 1988/7

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N2 - A novel approach to the synthesis of axially symmetric electrostatic lenses with minimum aberrations is presented. The method uses computer optimization to determine the electrode potentials of a multielectrode lens. The same method can be used for designing lenses for many different applications. As a preliminary result, an example of a lens with very small spherical aberration is given. The synthesis of electrostatic lenses can be accomplished automatically with an experimental setup controlled by an on-line computer.

AB - A novel approach to the synthesis of axially symmetric electrostatic lenses with minimum aberrations is presented. The method uses computer optimization to determine the electrode potentials of a multielectrode lens. The same method can be used for designing lenses for many different applications. As a preliminary result, an example of a lens with very small spherical aberration is given. The synthesis of electrostatic lenses can be accomplished automatically with an experimental setup controlled by an on-line computer.

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A Novel Approach to the Synthesis of Electrostatic Lenses with Minimized Aberrations

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