TY - JOUR
T1 - A new approach to fabricating high density nanoarrays by nanocontact printing
AU - Gu, Jian
AU - Xiao, Xiaoyin
AU - Takulapalli, Bharath R.
AU - Morrison, Michael E.
AU - Zhang, Peiming
AU - Zenhausern, Frederic
N1 - Funding Information:
The authors thank Professor Stuart Lindsay for his support of the project. This work is supported by the Proposition 301 Research Funds from the State of Arizona and National Institute of Health under R21HG00415401.
PY - 2008
Y1 - 2008
N2 - The authors introduce a new scheme of nanocontact printing that fabricates nanoarrays using stamps generated by ultraviolet nanoimprint lithography. Array patterns can be generated by this printing technique in a high density (number of features per unit area) fashion with a feature size as low as 30 nm and period of 100 nm. Sub- 500 nm alignment accuracy for multilayer printing has been obtained using a traditional contact mask aligner. They also demonstrate that they can image a nanoarray labeled by streptavidin by atomic force microscope.
AB - The authors introduce a new scheme of nanocontact printing that fabricates nanoarrays using stamps generated by ultraviolet nanoimprint lithography. Array patterns can be generated by this printing technique in a high density (number of features per unit area) fashion with a feature size as low as 30 nm and period of 100 nm. Sub- 500 nm alignment accuracy for multilayer printing has been obtained using a traditional contact mask aligner. They also demonstrate that they can image a nanoarray labeled by streptavidin by atomic force microscope.
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U2 - 10.1116/1.2998754
DO - 10.1116/1.2998754
M3 - Article
AN - SCOPUS:57249103721
VL - 26
SP - 1860
EP - 1865
JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
SN - 1071-1023
IS - 6
ER -