A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)

Erich J. Radauscher; Charles B. Parker; Kristin H. Gilchrist; Shane Di Dona; Zachary E. Russell; Stephen D. Hall; James B. Carlson; Sonia Grego; Steven J. Edwards; Roger P. Sperline; M. Bonner Denton; Brian R. Stoner; Jeffrey T. Glass; Jason J. Amsden

doi:10.1016/j.ijms.2016.10.021

A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)

Erich J. Radauscher, Charles B. Parker, Kristin H. Gilchrist, Shane Di Dona, Zachary E. Russell, Stephen D. Hall, James B. Carlson, Sonia Grego, Steven J. Edwards, Roger P. Sperline, M. Bonner Denton, Brian R. Stoner, Jeffrey T. Glass, Jason J. Amsden

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

The use of microelectromechanical systems (MEMS) components in miniature mass spectrometers is particularly attractive due to their small size and scalable manufacturing capability. Our group has pioneered the development of miniature electron ionization sources combining MEMS fabricated structures with integrated carbon nanotube (CNT) cold-cathode field emitters. However, until now they have been of limited use due to the limited ability to direct the ions into a mass analyzer. In this work, we design a miniature ion source using a microfabricated MEMS device and a low temperature co-fired ceramic (LTCC) carrier that includes electrical connections, ion optics for directing ions out of the device, and a sample inlet. We present the design and fabrication of the ion source; simulate the energy and angular dispersion; and experimentally determine the energy and angular dispersion.

Original language	English (US)
Pages (from-to)	162-169
Number of pages	8
Journal	International Journal of Mass Spectrometry
Volume	422
DOIs	https://doi.org/10.1016/j.ijms.2016.10.021
State	Published - Nov 2017
Externally published	Yes

Keywords

Carbon nanotube field emission
Electron ionization
LTCC
MEMS
Miniature

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

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10.1016/j.ijms.2016.10.021

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Radauscher, E. J., Parker, C. B., Gilchrist, K. H., Di Dona, S., Russell, Z. E., Hall, S. D., Carlson, J. B., Grego, S., Edwards, S. J., Sperline, R. P., Denton, M. B., Stoner, B. R., Glass, J. T., & Amsden, J. J. (2017). A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC). International Journal of Mass Spectrometry, 422, 162-169. https://doi.org/10.1016/j.ijms.2016.10.021

A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC). / Radauscher, Erich J.; Parker, Charles B.; Gilchrist, Kristin H. et al.
In: International Journal of Mass Spectrometry, Vol. 422, 11.2017, p. 162-169.

Research output: Contribution to journal › Article › peer-review

Radauscher, EJ, Parker, CB, Gilchrist, KH, Di Dona, S, Russell, ZE, Hall, SD, Carlson, JB, Grego, S, Edwards, SJ, Sperline, RP, Denton, MB, Stoner, BR, Glass, JT & Amsden, JJ 2017, 'A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)', International Journal of Mass Spectrometry, vol. 422, pp. 162-169. https://doi.org/10.1016/j.ijms.2016.10.021

Radauscher EJ, Parker CB, Gilchrist KH, Di Dona S, Russell ZE, Hall SD et al. A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC). International Journal of Mass Spectrometry. 2017 Nov;422:162-169. doi: 10.1016/j.ijms.2016.10.021

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title = "A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)",

abstract = "The use of microelectromechanical systems (MEMS) components in miniature mass spectrometers is particularly attractive due to their small size and scalable manufacturing capability. Our group has pioneered the development of miniature electron ionization sources combining MEMS fabricated structures with integrated carbon nanotube (CNT) cold-cathode field emitters. However, until now they have been of limited use due to the limited ability to direct the ions into a mass analyzer. In this work, we design a miniature ion source using a microfabricated MEMS device and a low temperature co-fired ceramic (LTCC) carrier that includes electrical connections, ion optics for directing ions out of the device, and a sample inlet. We present the design and fabrication of the ion source; simulate the energy and angular dispersion; and experimentally determine the energy and angular dispersion.",

keywords = "Carbon nanotube field emission, Electron ionization, LTCC, MEMS, Miniature",

author = "Radauscher, {Erich J.} and Parker, {Charles B.} and Gilchrist, {Kristin H.} and {Di Dona}, Shane and Russell, {Zachary E.} and Hall, {Stephen D.} and Carlson, {James B.} and Sonia Grego and Edwards, {Steven J.} and Sperline, {Roger P.} and Denton, {M. Bonner} and Stoner, {Brian R.} and Glass, {Jeffrey T.} and Amsden, {Jason J.}",

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year = "2017",

month = nov,

doi = "10.1016/j.ijms.2016.10.021",

language = "English (US)",

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pages = "162--169",

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AU - Radauscher, Erich J.

AU - Parker, Charles B.

AU - Gilchrist, Kristin H.

AU - Di Dona, Shane

AU - Russell, Zachary E.

AU - Hall, Stephen D.

AU - Carlson, James B.

AU - Grego, Sonia

AU - Edwards, Steven J.

AU - Sperline, Roger P.

AU - Denton, M. Bonner

AU - Stoner, Brian R.

AU - Glass, Jeffrey T.

AU - Amsden, Jason J.

PY - 2017/11

Y1 - 2017/11

N2 - The use of microelectromechanical systems (MEMS) components in miniature mass spectrometers is particularly attractive due to their small size and scalable manufacturing capability. Our group has pioneered the development of miniature electron ionization sources combining MEMS fabricated structures with integrated carbon nanotube (CNT) cold-cathode field emitters. However, until now they have been of limited use due to the limited ability to direct the ions into a mass analyzer. In this work, we design a miniature ion source using a microfabricated MEMS device and a low temperature co-fired ceramic (LTCC) carrier that includes electrical connections, ion optics for directing ions out of the device, and a sample inlet. We present the design and fabrication of the ion source; simulate the energy and angular dispersion; and experimentally determine the energy and angular dispersion.

AB - The use of microelectromechanical systems (MEMS) components in miniature mass spectrometers is particularly attractive due to their small size and scalable manufacturing capability. Our group has pioneered the development of miniature electron ionization sources combining MEMS fabricated structures with integrated carbon nanotube (CNT) cold-cathode field emitters. However, until now they have been of limited use due to the limited ability to direct the ions into a mass analyzer. In this work, we design a miniature ion source using a microfabricated MEMS device and a low temperature co-fired ceramic (LTCC) carrier that includes electrical connections, ion optics for directing ions out of the device, and a sample inlet. We present the design and fabrication of the ion source; simulate the energy and angular dispersion; and experimentally determine the energy and angular dispersion.

KW - Carbon nanotube field emission

KW - Electron ionization

KW - LTCC

KW - MEMS

KW - Miniature

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A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)

Abstract

Keywords

ASJC Scopus subject areas

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