Ledochowitsch, P.,
Félus, R. J.,
Gibboni, R. R.,
Miyakawa, A.,
Bao, S. &
Maharbiz, M. M.,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. p. 1031-1034 4 p. 5734604. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution