Cheung, L. S. L.,
Zheng, X. J.,
Stopa, A.,
Schroeder, J.,
Heimark, R. L.,
Baygents, J. C.,
Guzman, R. &
Zoharl, Y.,
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In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 431-434 4 p., 4805411.
Research output: Contribution to journal › Conference article › peer-review