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1992
Acid-catalyzed dehydration for the design of chemical amplification resists
Ito, H., Sooriyakumaran, R., Maekawa, Y. & Mash, E. A., 1992, Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering. Publ by ACS, p. 45-46 2 p. (Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering; vol. 66).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
9 Scopus citations