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Parametric modeling of edge effects for polishing tool influence functions
Daewook Kim
(Creator)
Won Hyun Park
(Creator)
Sug Whan Kim
(Creator)
James H. Burge
(Creator)
Agriculture and Life Sciences, College of
Optical Sciences
Optical Sciences, College of
Dataset
Overview
Scholarly Works
(1)
Research output
Scholarly Works per year
2009
2009
2009
1
Article
Scholarly Works per year
Scholarly Works per year
1 results
Publication Year, Title
(descending)
Publication Year, Title
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2009
Parametric modeling of edge effects for polishing tool influence functions
Kim, D. W.
, Park, W. H., Kim, S. W. & Burge, J. H.,
Mar 30 2009
,
In:
Optics Express.
17
,
7
,
p. 5656-5665
10 p.
Research output
:
Contribution to journal
›
Article
›
peer-review
Parametric Modeling
100%
Computer-controlled Polishing
20%
78
Scopus citations