Parametric modeling of edge effects for polishing tool influence functions

Daewook Kim (Creator)
Won Hyun Park (Creator)
Sug Whan Kim (Creator)
James H. Burge (Creator)

Dataset

1 Article

1 results

2009
Parametric modeling of edge effects for polishing tool influence functions
Kim, D. W., Park, W. H., Kim, S. W. & Burge, J. H., Mar 30 2009, In: Optics Express. 17, 7, p. 5656-5665 10 p.
Research output: Contribution to journal › Article › peer-review
78 Scopus citations