Parametric modeling of edge effects for polishing tool influence functions

  • Daewook Kim (Creator)
  • Won Hyun Park (Creator)
  • Sug Whan Kim (Creator)
  • James H. Burge (Creator)



Computer controlled polishing requires accurate knowledge of the tool influence function (TIF) for the polishing tool (i.e. lap). While a linear Preston’s model for material removal allows the TIF to be determined for most cases, nonlinear removal behavior as the tool runs over the edge of the part introduces a difficulty in modeling the edge TIF. We provide a new parametric model that fits 5 parameters to measured data to accurately predict the edge TIF for cases of a polishing tool that is either spinning or orbiting over the edge of the workpiece.
Date made available2009

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